EUVL
基本解释
- 極紫外光刻
英汉例句
- The principle, technological process and equipments of EUVL are discussed and its production cost, application prospects, advantages and disadvantages are also comparably analyzed.
本文論述了EUVL技術的原理、加工工藝和設備，竝對比分析了EUVL的生産成本、應用前景及其優缺點。