slurry polishing
常见例句
- Chemical mechanical polishing Rough surface Microscale flow Polishing slurry;
化學機械拋光; 粗糙表麪; 微尺度流動; 拋光液; - Laser inducement fluorescence (LIF) is used to study the effect of polishing parameters on slurry film thickness.
本文採用激光誘導熒光技術(LIF)來研究拋光蓡數對化學機械拋光加工區液膜厚度的影響。 - The study indicates that the thickness of slurry layer increases with increasing polishing speed and the increasing trend decreases with increasing polishing rotational speed.
研究表明,拋光液膜厚度隨著拋光速度的增加而增加,增加的趨勢隨拋光轉速的提高而減緩。 返回 slurry polishing